This system monitors critical facilities sensors and specialty gas usage.
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    • RUMS is on-line . Last sampling: 5/17/2008 11:10:10 AM
    Sensor NameDescriptionLow AlarmHigh AlarmCurrent ValueUnitsStatus
    Air_PressureCompressed air pressure 80125110.14psi
    ICW_PressureIndustrial cold water supply 509570.82psi
    N2_PressureNitrogen pressure 759586.9psi
    O2_PressureLab oxygen pressure 154832.98psi
    Recirc_PumpRecirculation cooling water pump status 0.520.99on/off
    Air_CompressorCA 88 air compressor 0.521on/off
    Air_DryerCompressed air dryer status 0.521on/off
    CHWS_TemperatureChilled house water supply temperature 385244.43Deg. F
    Cooling_TowerCooling tower pump 0.521on/off
    DI_Chem_TankDI chemical injection tank low alarm -10.50on/off
    DI_LevelLevel of water in DI storage tank 509691.51inches h2o
    DI_Makeup_Flow_RateDI water makeup flow rate -250.01gpm
    DI_ResistivityResistivity of DI water 17.21918.02Mohm
    Disilane_t19_Flow_RateTystar19 disilane flow rate -35-0.19sccm
    Disilane_t20_Flow_RateTystar20 disilane flow rate -190.37sccm
    DUV_Resistsvgcoat6 DUV resist dispense -10.50on/off
    Germane_t19_Flow_RateTystar19 germane flow rate -370.51sccm
    Germane_t20_Flow_RateTystar20 germane flow rate -230.15sccm
    HAZMAT_Pull_AlarmHAZMAT blue hand pull alarms -10.50.01on/off
    HAZMAT_Toxic_Gas_AlarmHAZMAT toxic gas detector -10.50on/off
    HF_83Exhaust hood fan 83 (432, 420, GL1-3) 0.521on/off
    HF_84Exhaust hood fan 84 (GL4-TC) 0.521on/off
    LN_1_LevelLiquid nitrogen vessel 1 level contact Matheson Dispatch, Scott Walters 800-284-0481,*1 ,*1, *2 (acct# 01036) 75300139.25inches N2
    LN_2_LevelLiquid nitrogen vessel 2 level 3011087.36inches N2
    Makeup_Air_TemperatureSupply air temperature 506860.01Deg. F
    N2_Flow_RateNitrogen flow rate 90027501950.3slpm
    O2_Flow_RateLab oxygen flow rate 6309.24slpm
    System_5_LevelLow level alarm for System 5 chiller water -10.50on/off
    Cleanvachouse cleanvac system -29.5-21-27.16inches Hg
    Cooling Tower Diff PressCooling Tower Loop Differential Pressure 154018.68psi
    GL4_Ambient_TempAmbient temp in GL4 557765.35Deg. F
    GL4_RHRelative humidity in GL4 1010067.08% RH
    HMMB_N2_Flow_RateNitrogen flow rate for HMMB -805004.87slpm
    Rums_TestTest channel. Please do not delete. 0.520.99Volts / 5