Microlab RUMS
Resource Utilization Monitoring System
This system monitors critical facilities sensors and specialty gas usage.
Sensor Status
      
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Sensor Configuration & Documentation
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RUMS is
on-line
. Last sampling: 11/7/2009 6:38:15 AM
Sensor Name
Description
Low Alarm
High Alarm
Current Value
Units
Status
Air_Pressure
Compressed air pressure
80
125
108.26
psi
ICW_Pressure
Industrial cold water supply
40
95
73.02
psi
N2_Pressure
Nitrogen pressure
75
95
87.91
psi
O2_Pressure
Lab oxygen pressure
15
48
36.92
psi
Recirc_Pump
Recirculation cooling water pump status
0.5
2
0.98
on/off
Air_Compressor
CA 88 air compressor
0.5
2
1
on/off
Air_Dryer
Compressed air dryer status
0.5
2
1
on/off
CHWS_Temperature
Chilled house water supply temperature
38
52
45.66
Deg. F
Cooling_Tower
Cooling tower pump
0.5
2
1
on/off
DI_Chem_Tank
DI chemical injection tank low alarm
-1
0.5
0.01
on/off
DI_Level
Level of water in DI storage tank
50
96
91.29
inches h2o
DI_Makeup_Flow_Rate
DI water makeup flow rate
-2
5
2.6
gpm
DI_Resistivity
Resistivity of DI water
17.4
19
17.81
Mohm
DUV_Resist
svgcoat6 DUV resist dispense
-1
0.5
0.01
on/off
HAZMAT_Toxic_Gas_Alarm
HAZMAT toxic gas detector
-1
0.5
0
on/off
HF_83
Exhaust hood fan 83 (432, 420, GL1-3)
0.5
2
1
on/off
HF_84
Exhaust hood fan 84 (GL4-TC)
0.5
2
1
on/off
LN_1_Level
Liquid nitrogen vessel 1 level contact Matheson Dispatch, Scott Walters 800-284-0481,*1 ,*1, *2 (acct# 01036)
75
300
184.12
inches H20
LN_2_Level
Liquid nitrogen vessel 2 level
30
110
94.76
inches N2
Makeup_Air_Temperature
Supply air temperature
50
70
62.31
Deg. F
N2_Flow_Rate
Nitrogen flow rate
900
2750
1775.6
slpm
O2_Flow_Rate
Lab oxygen flow rate
6
30
9.43
slpm
System_5_Level
Low level alarm for System 5 chiller water
-1
0.5
0
on/off
Ancillary_N2_Flow_Rate
Nitrogen flow rate to Ancillary Labs
0
500
100.36
slpm
Cleanvac
house cleanvac system
-29.5
-21
-26.24
inches Hg
Cooling Tower Diff Press
Cooling Tower Loop Differential Pressure
15
40
25.12
psi
GCAPG_Temperature
GCAPG Temperature
55
85
62.83
F
GCAWS6_Temperature
GCAWS6 Temperature
55
85
72.84
F
GL4_Ambient_Temp
Ambient temp in GL4
55
77
66.24
Deg. F
GL4_RH
Relative humidity in GL4
10
100
61.09
% RH
HMMB_N2_Flow_Rate
Nitrogen flow rate for HMMB
-300
500
1.02
slpm
Hoffer_N2_Pressure
LN1 pressure at Hoffer flow meter
108
128
118.6
psi
Rums_Test
Test channel. Please do not delete.
0.5
2
4.97
Volts / 5