Microlab RUMS
Resource Utilization Monitoring System
This system monitors critical facilities sensors and specialty gas usage.
Sensor Status
      
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Sensor Configuration & Documentation
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RUMS is
on-line
. Last sampling: 5/17/2008 11:10:10 AM
Sensor Name
Description
Low Alarm
High Alarm
Current Value
Units
Status
Air_Pressure
Compressed air pressure
80
125
110.14
psi
ICW_Pressure
Industrial cold water supply
50
95
70.82
psi
N2_Pressure
Nitrogen pressure
75
95
86.9
psi
O2_Pressure
Lab oxygen pressure
15
48
32.98
psi
Recirc_Pump
Recirculation cooling water pump status
0.5
2
0.99
on/off
Air_Compressor
CA 88 air compressor
0.5
2
1
on/off
Air_Dryer
Compressed air dryer status
0.5
2
1
on/off
CHWS_Temperature
Chilled house water supply temperature
38
52
44.43
Deg. F
Cooling_Tower
Cooling tower pump
0.5
2
1
on/off
DI_Chem_Tank
DI chemical injection tank low alarm
-1
0.5
0
on/off
DI_Level
Level of water in DI storage tank
50
96
91.51
inches h2o
DI_Makeup_Flow_Rate
DI water makeup flow rate
-2
5
0.01
gpm
DI_Resistivity
Resistivity of DI water
17.2
19
18.02
Mohm
Disilane_t19_Flow_Rate
Tystar19 disilane flow rate
-3
5
-0.19
sccm
Disilane_t20_Flow_Rate
Tystar20 disilane flow rate
-1
9
0.37
sccm
DUV_Resist
svgcoat6 DUV resist dispense
-1
0.5
0
on/off
Germane_t19_Flow_Rate
Tystar19 germane flow rate
-3
7
0.51
sccm
Germane_t20_Flow_Rate
Tystar20 germane flow rate
-2
3
0.15
sccm
HAZMAT_Pull_Alarm
HAZMAT blue hand pull alarms
-1
0.5
0.01
on/off
HAZMAT_Toxic_Gas_Alarm
HAZMAT toxic gas detector
-1
0.5
0
on/off
HF_83
Exhaust hood fan 83 (432, 420, GL1-3)
0.5
2
1
on/off
HF_84
Exhaust hood fan 84 (GL4-TC)
0.5
2
1
on/off
LN_1_Level
Liquid nitrogen vessel 1 level contact Matheson Dispatch, Scott Walters 800-284-0481,*1 ,*1, *2 (acct# 01036)
75
300
139.25
inches N2
LN_2_Level
Liquid nitrogen vessel 2 level
30
110
87.36
inches N2
Makeup_Air_Temperature
Supply air temperature
50
68
60.01
Deg. F
N2_Flow_Rate
Nitrogen flow rate
900
2750
1950.3
slpm
O2_Flow_Rate
Lab oxygen flow rate
6
30
9.24
slpm
System_5_Level
Low level alarm for System 5 chiller water
-1
0.5
0
on/off
Cleanvac
house cleanvac system
-29.5
-21
-27.16
inches Hg
Cooling Tower Diff Press
Cooling Tower Loop Differential Pressure
15
40
18.68
psi
GL4_Ambient_Temp
Ambient temp in GL4
55
77
65.35
Deg. F
GL4_RH
Relative humidity in GL4
10
100
67.08
% RH
HMMB_N2_Flow_Rate
Nitrogen flow rate for HMMB
-80
500
4.87
slpm
Rums_Test
Test channel. Please do not delete.
0.5
2
0.99
Volts / 5